Complaint
| (,) | |||
| (Al 2 O 3 , Si, SiC, Ge, Ge-Si, Gan, GaAs, GaAsAl, GaAsP, InSb, ZnO, AlN) Wafer, LED | |||
| () | ,,,HUD, | ||
| ,, | |||
| ,,,. | |||
| *:.,. | |||
| FD170T | FD220T | FD 320T | FD450T | |||
| Φ 150 /6 | Φ 220 /8 | Φ 320 /12 | Φ 460 /18 | |||
| . | Φ 150×30 | Φ 220 × 50 | Φ 320×50 | Φ 460×50 | ||
| 50μm≤N | 75μm≤N | 95μm≤N | 120μm≤N | |||
| 0,5 | 0,5 | 0,5 | 0,5 | |||
| 1 | 1 | 1 | 1 | |||
| 0-3000 | 0-3000 | 0-3000 | 0-3000 | |||
| 0-300 | 0-300 | 0-300 | 0-300 | |||
| 650 | 850 | 900 | 920 | |||
| 1200×550 | 1150×1200 | 1150×1200 | 1150×1200 | |||
| - | SPS | |||||
| - | SPS | |||||
| *:,. | ||||||
