Element | Reinheit | Reinheit |
Argon (Ar) | ≥99,999 % | ≥99,9999 % |
H2 | ≤0,5ppm | ≤0,1ppm |
O2 | ≤1,5ppm | ≤0,1ppm |
N2 | ≤4ppm | ≤0,4ppm |
CO | ≤1ppm | ≤0,1ppm |
CO2 | ≤1ppm | ≤0,1ppm |
CH4 | ≤1ppm | ≤0,1ppm |
H2O | ≤3ppm | ≤0,2ppm |