Mode Dimension | LH-800 | LH-1250 | LH-1416 | LH-1618 |
800*1000mm | 1200*1500mm | 1400*1600mm | 1600*1800mm | |
Coating mode and main confirguration | Eight multi-arc targets | Twelve multi-arc targets | Fourteen multi-arc targets | Twenty multi-arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | |||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling | |||
Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) | |||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | |||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | |||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |
More information about our vacuum coating machine,pls do not hesitate to contact:
Contact person:Mandy Liu