Mode Dimension | JTZ-1200 | JTZ-1200 | JTZ-1400 | JTZ-1400 |
1200*1400mm | 1250*1500mm | 1400*1700mm | 1400*1800mm | |
Film type | Meal film, translucent film, nonconductive film, electromagnetism shield film, dielectric film, etc. | |||
Power source | Resistance evaporation power, DC magnetron power, RF power | |||
Sputtering and electrode structure | Column magnetron targets, plane rectangle targets, twin targets, evaporation electrode. | |||
Vacuum chamber structure | Vertical double door, Vertical single door, pump system postposition, horizontal single door, pump system for side. | |||
Ultimate vacuum | 4.0*10 -4 pa | |||
Vacuum system | Diffusion pump +Roots pump +Mechanical pump +Holding pump | |||
Pump time | Pump from atmosphere to 8.5*10 -3 , below minutes | |||
Workpiece motion mode | Public rotation/ Frequency control | |||
Control mode | Manual/Automatic all in one mode, Touch screen + PLC | |||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |
Why Choose HCVAC system?
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