Auto Laser Scan Video Measuring System for Wafers

Min.Order: 1
Product origin: Dongguan, Guangdong, China
Infringement complaint: complaintComplaint
US$ -1

Description
AutoScan 652 Auto Laser Scan Vision Measuring Machine

 

Production Introduction:
AutoScan is equipped with non-contact laser sensor to realize 3D measurement. It is widely used in non-contact measurement, and able to realize thickness, flatness and scan measurement.



Key words: 
Repeatability: ±2um
Resolution: 0.0001mm
X/Y-axis Travel(mm): 600x500mm
Z-axis Travel(mm): 200mm


Technical Specification:
Product NameAuto Laser Scan Vision Measuring Machine
ModelAutoScan 652
Code#522-141
X/Y-axis Travel(mm)600x500mm
Z-axis Travel(mm)200mm
X/Y/Z 3-axis
 Linear Scale(mm)
High precision linear scale,resolution:0.0001mm
Guidance ModePrecision linear guide,double-track double slider guide
Operation ModeJoystick controller, Mouse operation, automatic detection program
Measurement AccuracyXY-axis:≤2+L/200(um)
Z-axis:≤5+L/200(um)
Repeatability±2um
Video System1/3" Color CCD Camera
6.5X auto zoom lens
6.5X auto zoom lens; optical magnification: 0.7X-4.5X; video magnification:20X~129X(21.5"monitor)
Field of View(mm)
(Diagonal *Horizontal*Vertical)
Lens Magnification0.7x1x2.0x3.0x4x4.5x
1/2"CCD11.43x9.14x6.868.00x6.40x4.804.00x3.20x2.402.67x2.13x1.602.00x1.60x1.201.78x1.42x1.07
IlluminationContourLED Parallel Contour Illumination
Surface5-ring 8-division 0~255 grade continue adjustable
Software SystemiMeasuring 5.0 Fully Auto Measuring Software
Load Capacity30kg
Working EnvironmentTemperature 20ºC±2ºC,Humidity Range<2ºC/hr,Humidity 30~80%,Vibration<0.002g,<15Hz
Power220V/50Hz/10A
Dimension1600x1050x1650mm
Packing Dimension1800x1400x2000mm
Weight(Kg)1380Kg
* L is measuring length,unit is mm, the mechanical accuracy of Z-axis and focus accuracy is greatly related to the surface of the workpiece.
* * Magnification is approximate value, it is related to the dimension of monitor and resolution.
Customers can choose 0.5X or 2X optional objective, and realize image magnification: 10X~64.5X or 40X~258X.


Application:

Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components

Precision Metal Processing: Machining, Stamping, Powder Metallurgy Injection Molding

Precision plastic



Product Characteristics:
  • Imported P grade linear guide,, precision grinding ball screw and AC servo motor, ensure accuracy stability of system position;
  • Imported high definition color industry camera, ensure clear observation and stable measurement requirement;
  • 6.5X continue auto zoom lens, precision auto zoom, only need to make pixel calibration once time;
  • Programmable 5-ring 8-division LED surface illumination, contour parallel LED illumination, can realize 256 grade brightness adjustment intelligently.

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