3D Auto Optical Inspection System for Semiconductor Manufacturing

Min.Order: 1
Product origin: Dongguan, Guangdong, China
Infringement complaint: complaintComplaint
US$ -1

Description
3D Fully Auto Vision Measuring Machine MVA Series


Product Introduction:

3D MVA is a classical Fully Auto Vision Measuring Machine, it is equipped with four-axis motorized control and auto zoom lens and probe, powerful function, simple operation, widely application.



Product Characteristics:
  1. Four-axis CNC fully auto close loop control, auto measurement;
  2. "00" grade "JINANQING"marble base and pillar, stable and reliable;
  3. Precision linear guide, grinding ball screw and AC servo motor, ensure accuracy stability of system  position;
  4. High precision linear scale, resolution is 0.5um, high accuracy, great stability;
  5. Imported high definition color industry digital camera, ensure clear observation and stable measurement requirement;
  6. 6.5X continue auto zoom lens, precision auto zoom, only need to make pixel calibration once time;
  7. Programmable 5-ring 8-division LED surface illumination, contour parallel LED illumination, can realize 256 grade brightness adjustment intelligently;
  8. With proprietary powerful function fully auto measuring software iMeasuring 4.2;
Technical Specification:
Product Name3D Fully Auto Vision Measuring Machine
ModelMVA-3020P
Code#524-360
X/Y-axis Travel(mm)300x200
Z-axis Travel(mm)200
X/Y/Z 3-axis
 Linear Scale(mm)
High precision linear scale,resolution:0.0005mm
Guidance ModePrecision linear guide,double-track double slider guide
Operation ModeJoystick controller, Mouse operation, automatic detection program
Measurement AccuracyXY-axis:≤3+L/200
Z-axis:≤5+L/200
Repeatability±2um
Video SystemHigh definition 1/3" Color CCD Camera,
6.5X continue click zoom lens; optical magnification: 0.7X-4.5X; video magnification:126X~172X(21.5"monitor)
Field of View(mm)
(Diagonal * Horizontal*Vertical)
Lens Magnification0.7x1x2.0x3.0x4x4.5x
1/3"CCD8.57x6.86x5.146.00x4.80x3.603.00x2.40x1.802.00x1.60x1.201.50x1.20x0.901.33x1.07x0.80
IlluminationContourLED Parallel Contour Illumination
Surface5-ring 8-division 0~255 grade continue adjustable
Software SystemiMeasuring 4.2 Fully Auto Measuring Software
Load Capacity (Kg)25
Working EnvironmentTemperature 20ºC±2ºC,Humidity Range<2ºC/hr,Humidity 30~80%,Vibration<0.002g,<15Hz
Power220V/50Hz/10A
Dimension(mm)1200x780x1650
Packing Dimension(mm)1360x1030x1900
Weight(Kg)380
* L is measuring length,unit is mm, the mechanical accuracy of Z-axis and focus accuracy is greatly related to the surface of the workpiece.
* * Magnification is approximate value, it is related to the dimension of monitor and resolution.
Customers can choose 0.5X or 2X optional objective, and realize image magnification: 13X~86X or 52X~344X.



Applicaiton:

Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components

Precision Metal Processing: Machining, Stamping, Powder Metallurgy Injection Molding

Precision plastic

Your Precison, Our Mission!

Product Tag:
Related categories:
Scroll to Top