Complaint
| SF6 Humidity | |
| Measuring range | Dew point -80~+20ºC (support ppmv, etc.) |
| Dew point accuracy | ± 2 ºC (when the dew point temperature is below 0 ºC, the sensor output is the frost point) |
| Response time | 63% [90%] +20→-20ºC Td 5s[45s] -20→-60ºC Td 10s[240s] |
| Resolution | Dew point 0.1ºC or 0.1ppm |
| Repeatability | ± 0.5 ºC |
| Gas flow | 0.8-0.9L/min. |
| Pressure measurement | 0-1.0Mpa |
| Probe protection | Stainless steel sintering filter |
| SF6 Purity | |
| Measuring range | 0 ~ 100% SF6 |
| Accuracy and repeatability | ± 0.5%, nothing to do with the flow. |
