Nitrogen flow capacity | ≥10 Nm3/h(normal temperature & normal pressure) |
Nitrogen purity | ≥99.999% |
Residual oxygen | ≤0.001% |
Nitrogen outlet pressure | 0.3-0.6Mpa(adjustable) |
microorganism | <1cfu/ m3 |
Dust content | Particle size≥5μm,Number of particles≤20/ m3 |
Particle size≥0.5μm<5μm,Number of particles≤3520/ m3 | |
Oil content | ≤ 0.0005% |
Dimension(Length*width*height) | 1560*1080*2050mm |
Weight | 1100Kg |