Complaint
Halogen lamp RTP vertical rapid annealing furnace is a fast 8-inch piece of rapid annealing furnace, adopting innovative heating technology, which can realize the real substrate temperature measurement, and it does not need to adopt the traditional rapid annealing furnace temperature compensation, and it has temperature control precision, high temperature repeatability. Customers include many leading semiconductor companies and international scientific research team, which are ideal choices for the annealing process of semiconductor process.
Technical parameters of RTP rapid annealing furnace:
| Substrate size | 8 inch |
| Substrate base | Quartz needle (optional Si-C coated graphite base) |
| Temperature range | 150-1250ºC |
| Heating speed | 10-150ºC/S |
| Temperature uniformity | ≤±1.5% (@800ºC, Silicon wafer) ≤±1.0% (@800ºC, Substrate on Si-C coated graphite susceptor) |
| Temperature control accuracy | ≤ ±3ºC |
| Temperature repeatability | ≤ ±3ºC |
| Vacuum degree | 5.0E-3 Torr / 5.0E-6 Torr |
| Pneumatic supply | Standard 1-channel N2 purge and cooling air circuit, controlled by MFC (maximum 3 channels) |
| Annealing duration | ≥35min@1250ºC |
| Temperature control | Fast digital PID control |
| Size | 900mm*650mm*1600mm |
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Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service.
