Turbo molecular vacuum pump unit

Introduction:
Molecular pump automatic unit includes automatic control system, according to the procedure to control the start and stop of each pump and valve, to achieve pre-pumping, front-stage, high valve control. Suitable for a variety of use environments. Users can customize valves, main pumps, front pumps and special functions as needed.

Molecular pumps can not work independently, in the purchase of molecular pumps at the same time, need to support the corresponding front pumps, valves, cooling systems and other related accessories. In order to facilitate the user to buy and use, we have introduced a molecular pump unit.

Thanks to the modular design principle, molecular pump units have many combination possibilities, optional with our various molecular pumps, and supporting the front pump, vacuum meter, cooling system, pre-pump valve system and automatic control system. As a result, molecular pump units are perfectly adapted to application requirements in the field of high vacuum and ultra-high vacuum.

Vacuum units also offer customized services to individually design special structures to meet your specific application needs in research and development, accelerators, analytical and surface physics, as well as vacuum process technology and general vacuum applications.

Introduction:
Pumping speed: 4000L/s

Ultimate pressure: 5*10^-7Pa

Max pre-pressure: 100Pa

Motor speed: 24000r/min

Monolithic rotor

Resistance to atmospheric shock

Can remove dusty gas

Can work continuously under the condition of high vacuum and low vacuum

High temperature resistance

Easy to maintain

Semiconductor production

Electronics gun exhaust, ionization source exhaust

FPD manufacturing

Surface treatment, surface modification

Manufacture of various electronic components

Lamp production, optical components production

Accelerating device, radiation facility, nuclear fusion research

Heat treatment

Research and development