Oil Free High Speed High Vacuum Dry Pump

Min.Order: 1
Product origin: Zhengzhou, Henan, China
Infringement complaint: complaintComplaint
US$ 9800 ~ 9900

Description
High speed turbo vacuum pump

1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking

 
ModelFF-160
Pumping Speed(/l/s,Air)600
Inlet FlangeDN160 ISO-K
Outlet FlangeKF 40 (DN)
Ultimate Vacuum(Pa)≤ 6x10-4Pa
Rotation Speed(rpm)36000
Run-Up Time(min.)< 6
Bearing TypeCeramic
VIB(um)≤ 0.1
Backing Pump (l/s)4-8
Cooling Method,optionalWater
Cooling Water Temperature(ºC)≤ 25
Bake-out temperature(ºC)≤ 100
Ambient Temperature (ºC)S-40
LubricationOil
Mounting or lentationVertical ±5°







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