mode dimension | ZZ-1200 | ZZ-1400 | ZZ-1600 | ZZ-1800 |
| 1200*1400mm | 1400*1600mm | 1600*1800mm | 1800*2000mm |
film Type | Semitransparent film, non-conducting film, gold, silver, red, blue, green, purple, seven color, etc. |
Power source Type | Thermal evaporation power, ion bombard power, RF power |
Vacuum chamber structure | Vertical double/single door, horizontal single door, pump system postposition |
Ultimate vacuum | 8.0*10 -4 Pa |
Vacuum system | Diffusion pump +Roots pump +Mechanical pump +Holding pump |
Pump time | Pump from atmosphere to 5.0*10 -2 , about 6 minutes |
Workpiece motion mode | Public rotation/Frequency control |