Working Voltage | 110V AC / 220V AC selectable |
Structure | Aluminum casting case to keep spinning stable |
Spin Plates | - Chamber size is 134mm diameter, can accept wafer sample 4" diameter at Max.
- Two 4" stainless steel spin plates are included, which can hold one or multiple samples by wax or double-sided tape
- Please click here to learn how to mount samples on the plate by using removable double-sided tape. It is easy and more economical than vacuum chuck.
- One roll of 3M removable double-sided tape (3/4' W x 400" L) is included for immediate use (please click picture below to see specs and order spare tape)
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Spin Speed | - Digital display with variable speed up to 8000 RPM
- Digital control panel with two programmable segments of different spin times (1~60s) and speeds
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Liquid Injecting | - One 20 mL syringe is included for liquid injection
- Support rod and swing arm of injector are included for easy coating
- The syringe holder height can be adjusted and rotated freely along the support rod
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Optional | - You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating
- Using plasma cleaner to treat substrate surface before coating can improve film quality
- You may consider our new product: Heatable syringe
- Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available
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Product Dimensions | 13''(L) x 10''(W) x 7''(H) |
Net Weight | 20 kg (44 lbs) |
Compliance | CE Certified |
Warranty | - One year limited with lifetime support
- Rusting and damage due to improper storage condition or maintenance are not covered by warranty
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Application Notes | - In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates.
- You may place the compact spin coater into a glove box to operate in inert gas
- Cleaning instruction for the spin coaters.
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Warnings | - Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
- If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
- For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
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Shipping Dimensions | 20"(L) x 16"(W) x 18"(H) |
Shipping Weight | 45 lbs |