Complaint
| Furnace Construction | Double layer steel casing with air cooling High purity alumina fiber insulation for max. energy saving Splitable cover for easy tube replacement |
| Power Consumption | 5 KW |
| Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz |
| Maximum Temperature | 1200 C |
| Continuous Temperature | 1100 C |
| Maximum Heating Rate | <= 20 C /min |
| Heating Zone Length | Three zones: (880mm, 35" in total) Zone 1: 220mm (8.6" ) Zone 2: 440mm (17.3") Zone 3: 220 mm (8.6") |
| Constant Temperature Zone | If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC. If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC. |
| Temperature Accuracy | +/- 1oC |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
| Temperature Controller | Three precision temperature controllers to control three zones separately. PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 C temperature accuracy. RS485 Communications Port.. |
| Quartz Tube& Sealing Flanges | 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included. Vacuum flanges with valves and pressure gauge are included. Thermal block must be placed inside tube as the drawing below |
| Vacuum Sealing Flanges | Two stainless steel flanges with both vacuum gauge and valves included. Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr by using mechanical + molecular pump. Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr. |
| Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: |
| Vacuum Pump | 120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace. |
| Gas Flow Meter and Pressure Meter | Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates Compact direct read flow meter, 10-100 cc/min. Compact direct read flow meter, 16-160 cc/min. Compact direct read flow meter, 25-250 cc/min. |
| Valves | Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately |
| Dimensions | Furnace: 1100 X 450 x 670 mm Bottom Mobile case: 600x600x597 mm |
