Complaint
| Item | Index | ||
| CF4, %(V/V)≥ | 99.999 | 99.995 | 99.99 |
| N2, 10-6(V/V) ≤ | 4 | 20 | 40 |
| O2, 10-6(V/V) ≤ | 1 | 5 | 10 |
| CO2, 10-6(V/V) ≤ | 1 | 5 | 10 |
| CO, 10-6(V/V) ≤ | 0.3 | 0.5 | 1 |
| SF6, 10-6(V/V) ≤ | 1 | 1 | 5 |
| H2O, 10-6(V/V) ≤ | 1 | 5 | 10 |
| HF, 10-6(V/V) ≤ | 0.1 | 0.3 | 0.3 |
| TFC(CH2F2,CHF3,C2F3,C3F8),10-6(V/V) ≤ | 1 | 10 | 30 |
| Total impurity content, ppm (V/V) ≤ | 10 | 50 | 100 |
| Parameter Critical Assay | Unit | Company Specification | Analysis Results | Analysis Method |
| Tetrafluoromethane (CF4) | %(v/v) | 99.999% Min | >99.999% | G.C |
| Oxygen(O2) | v.ppm | <1.0 | <0.2 | G.C |
| Nitrogen(N2) | v.ppm | <1.0 | <0.6 | G.C |
| Carbon Monoxide(CO) | v.ppm | <0.5 | <0.2 | G.C |
| Carbon Dioxide(CO2) | v.ppm | <0.5 | <0.2 | G.C |
| Sulfur Hexafluoride(SF6) | v.ppm | <0.2 | <0.1 | G.C |
| Trifluoromethane(CHF3) | v.ppm | <0.5 | <0.1 | G.C |
| Other Halocarbon(OFC)* | v.ppm | <1.0 | <0.7 | G.C |
| Total Hydrocarbon(THC)* | v.ppm | <0.5 | <0.1 | G.C |
| Moisture(H2O) | v.ppm | <0.5 | <0.2 | Moisture Analyzer |
| Acidity(as HF) | v.ppm | <0.1 | <0.08 | Acidity Analyzer |
| Total Contents Of Impurity | v.ppm | ≤10.0 | <10.0 | G.C |
| Particale(>0.1μm) | pcs/liter | <10.0 | <1.0 | ICP-MS |
