High Purity 99.999% Nitrogen Trifluoride Gas NF3

Min.Order: 100

Product origin: Qingdao, Shandong, China

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US$ 25 ~ 35

Description

Nitrogen trifluoride NF3 CAS:7783-54-2
Applications:Nitrogen trifluoride is used in the plasma etching of silicon wafers. Today nitrogen trifluoride is predominantly employed in the cleaning of the PECVD chambers in the high volume production of liquid crystal displays and silicon-based thin film solar cells. In these applications NF3 is initially broken down in situ, by a plasma. The resulting fluorine atoms are the active cleaning agents that attack the polysilicon, silicon nitride and silicon oxide. Nitrogen trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. It is preferred to fluorine gas due to its convenient handling properties, reflecting its considerable stability.It is compatible with steel and Monel, as well as several plastics.
Synthesis and reactivity:
Nitrogen trifluoride is a rare example of a binary fluoride that can prepared directly from the elements only at very uncommon conditions, such as electric discharge. After first attempting the synthesis in 1903, Otto Ruff prepared nitrogen trifluoride by the electrolysis of a molten mixture of ammonium fluoride and hydrogen fluoride. It proved to be far less reactive than the other nitrogen trihalides nitrogen trichloride, nitrogen tribromide and nitrogen triiodide, all of which are explosive. Alone among the nitrogen trihalides it has a negative enthalpy of formation. Today, it is prepared both by direct reaction of ammonia and fluorine and by a variation of Ruff's method. It is supplied in pressurized cylinders.

Impurities	NF3 ≥ 99.995%	NF3 ≥ 99.99%	NF3 ≥ 99.98%	NF3 ≥ 99.9%
CF4	≤20 Vol.ppm	≤40 Vol.ppm	≤100 Vol.ppm	≤500 Vol.ppm
N2	≤5 Vol.ppm	≤5 Vol.ppm	≤10 Vol.ppm	≤50 Vol.ppm
O2+Ar	≤3 Vol.ppm	≤5 Vol.ppm	≤10 Vol.ppm	≤50 Vol.ppm
CO2	≤1 Vol.ppm	≤5 Vol.ppm	≤10 Vol.ppm	≤10 Vol.ppm
H2O	≤1 Vol.ppm	≤1 Vol.ppm	≤1 Vol.ppm	≤1 Vol.ppm
HF	≤1 Vol.ppm	≤1 Vol.ppm	≤1 Vol.ppm	≤1 Vol.ppm
SF6	≤1 Vol.ppm	≤2 Vol.ppm	≤2 Vol.ppm	≤25 Vol.ppm
N2O	≤1 Vol.ppm	≤5 Vol.ppm	≤10 Vol.ppm	≤10 Vol.ppm
CO	≤0.5 Vol.ppm	≤5 Vol.ppm	≤10 Vol.ppm	≤10 Vol.ppm

About Ruiming
Qingdao Ruiming Bluesky Energy Co., Ltd is located at Qingdao, the biggest seaport in China, owns the convenient shipping advantages.
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Main products:
1. Gas products: Argon gas, helium gas, hydrogen gas, Carbon Oxide (CO2), propane gas, acetylene, Nitrous Oxide, LO2, LN2,LCO2. LNG, ect.
2. All kind of high pressure gas cylinder and welded gas cylinders:
      Oxygen Cylinder (GB 5099/ ISO 9809-3/ DOT/ EN standard gas cylinders)
      Acetylene Gas cylinder
      Liquid Chlorine Cylinder/ Liquid Ammonia Cylinder
3. Liquid nitrogen containers: all kinds of liquid nitrogen containers from 2L to 50L
4. Cryogenic Liquid Cylinder : 175L 195L 210L 495L capacity
5. Liquid storage tank: 5M3, 10 M3, 20M3, 30 M3, 50M3, 100M3, 200M3, ect.
6. Gas equipment: Vaporizer, Manifold, Gas filling pump, ect.

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