Item | Model | With Detector Option | With Stage Option |
Mini-SEM | DJ-SEM150 | DJ-SEM150S | DJ-SEM150S-MS |
DJ-SEM150D | DJ-SEM150D-MS | ||
DJ-SEM150D-ST |
Resolution | 5nm (30kV,SE) |
Magnification | 20x~150,000x |
Accelerating Voltage | 1~30kV |
Detector | SE Detector, Optional BSE detector, EDS, etc. |
Electron Gun | Pre centered tungsten filament cartridge |
Lens system | Focus Lens:2-stage Electromagnetic Condenser Lens Objective Lens: 1-stage Electromagnetic Objective Lens |
Stage | 3 axis System, X, Y-axis : 35mm / R-axis: 360° Optional 5-axis sample stage: X:40mm, Y:40mm, Z:40mm, R:360°, T:0~90° |
Image shift | Image shift X, Y Image Shift (±150um) |
Iris Diaphragms | Adjustable iris diaphragms(30/50/50/100μm) |
Max Sample size | 80mm in diameter, 35mm in height |
Image Scanning system | Fast Scan:320*240 Slow Scan: 640*480 Photo Mode 1:1280*960 Photo Mode 2:2560*1920 Photo Mode 3:5120*3840 |
Automatic Function | Auto start,Auto focus,Auto Brightness/Contrast |
Image format | BMP, JPEG, PNG, TIFF |
Image Data display | Magnification,Detector type,Accelerating Voltage,Vacuum mode,Logo(Text),Date and time,Text marker,scale bar |
Vacuum system | High vacuum mode, mechanical pump, molecular pump, vacuuming time: within 3 minutes |
Device Volume | 460(W)*600(L)*950(H)mm |
Equipment environment | Temperature:15ºC~30ºC , Humidity:70% or less Power source:Single phase 100~240V AC, 1KW, 50/60Hz |