Description
PLD laser sputtering coating equipment for preparing semiconductor film,Superlattice
Brief Introduction of Customizable pulsed laser sputtering deposition system:
Pulsed laser deposition system, abbreviated as PLD system, this system consists of two parts: excimer laser and vacuum coating chamber; vacuum coating chamber consists of a sputtering vacuum chamber, a rotating target stage, an anti-oxidation substrate heating stage, a working gas path, gas extraction system, installation machine table, vacuum measurement and electrical control system.
Equipment composition of Customizable pulsed laser sputtering deposition system:
1. Laser
Based on LightMachinery's best-selling IPEX series of industrial-grade excimer lasers, the laser is optimized for PLD applications; the IPEX series excimer lasers exhibit excellent performance, durability, reliability, and easy integration performance to meet the requirements of researchers and system integrators in the field of pulsed laser deposition (PLD).
1) Laser advantages
(1) GasMiser-1000 option works with ICON technology to extend gas life and reduce operating costs
(2) Excellent spot uniformity and energy stability between pulses, short pulse width
(3) Energy remains constant at all repetition frequencies
(4) EasyClean automatic sealing feature keeps gas filled and reduces maintenance downtime
(5) Highly stable optical mount for excellent beam pointing accuracy
(6) Customizable beam delivery system to suit specific PLD application needs
2) PLD stable performance
Constant pulse energy: The IPEX-740 / 760 series excimer lasers combining ICON and GasMiser-1000 technologies have unparalleled dynamic and static gas life after a single gas exchange. From the single to the maximum repetition frequency, the pulse energy is constant at all repetition frequencies. This method guarantees that the PLD process parameters will not change with the change of laser working time and repetition frequency.
Constant pulse stability: The advanced energy monitoring method is used to adjust the pulse energy, which can accurately adjust the discharge voltage and the mixed gas, and maintain a constant output energy under all working conditions (including Burst mode). Pulse-to-pulse stability is better than 1%.
Constant pointing stability: High-stability core optics bracket, providing pointing stability superior to 200μrad, ensuring that no recalibration is required after optical repair.
Constant beam quality: The beam intensity distribution of the IPEX-740 / 760 series lasers is designed to have a sharp edge and a flat top, especially has minimal change within the working life of the laser chamber.
3) Laser specifications| Wavelength(nm) | 193 (ArF) | 248 (KrF) | 308(XeCl) |
| Stabilised Pulse Energy(mJ) at all repetition rates | IPEX-740 Series | 150 | 400 | 250 |
| IPEX-760 Series | 200 | 600 | 500 |
| Maximum Pulse Energy(mJ) at low repetition rates | IPEX-740 Series | 230 | 450 | 300 |
| IPEX-760 Series | 250 | 700 | 600 |
| Stabilised Average Power(W) | IPEX-746 | 15 | 40 | 25 |
| IPEX-744 | 6.0 | 20 | 12 |
| IPEX-742 | 3.0 | 10 | 6.0 |
| IPEX-766 | 10 | 30 | 25 |
| IPEX-764 | 5.0 | 18 | 10 |
| IPEX-762 | 2.5 | 9.0 | 5.0 |
| Maximum Repetition Rate (pps) | IPEX-746 | 100 | 100 | 100 |
| IPEX-744 | 40 | 50 | 50 |
| IPEX-742 | 20 | 25 | 25 |
| IPEX-766 | 40 | 50 | 40 |
| IPEX-764 | 25 | 30 | 20 |
| IPEX-762 | 12 | 15 | 10 |
Pulse Duration(ns)
(FWHM,nominal) | IPEX-740/760 Series | 12 - 20 |
Beam Dimensions(mm)
(V×H,nominal) | IPEX-740 Series | 12 × 26 |
| IPEX-760 Series | 12 × 28 |
Beam Divergence(mrad)
(V×H,nominal) | IPEX-740/760 Series | 1 × 3 |
2. Vacuum coating chamber
1) 1 set of sputtering vacuum chamber components
The size of the spherical vacuum chamber is Ф450mm. It is made of high-quality stainless steel. It is welded by argon arc. The surface is polished by a special process. The interface is sealed with a metal gasket or a fluorine rubber ring.
2) 1 set of rotating target platform components
(1) Four targets can be loaded at a time, target size: (i) Φ60mm and (ii) Φ25mm;
(2) Each target can realize rotation, the rotation speed is 5~60 rpm, continuously adjustable, controlled by the motor-driven magnetic coupling mechanism;
(3) The target position revolution transposition mechanism is controlled by the motor driven magnetic coupling mechanism.
(4) The target material shield shields 4 targets, and only one target material is sputtered into the film at a time, so as to avoid cross contamination between the target materials.
3) Antioxidant substrate heating table assembly 1 set
(1) substrate size: φ2 ″ substrate can be placed;
(2) The maximum temperature of substrate heating is 800ºC±1ºC, controlled by thermocouple closed-loop feedback, and the heater is made of antioxidant material.
(3) The substrate can rotate continuously, the speed is 5~60 rpm, controlled by the motor-driven magnetic coupling mechanism;
(4) The distance between the substrate and the target platform is adjustable from 30 to 90mm and controlled by a manual bellows adjustment mechanism outside the chamber;
(5) Manual control sample baffle components: 1 set;
(6) Sample holder: 2;
4) Window and flange interface parts 1 set
5) Laser beam scanning control system 1 set
Two-dimensional scanning mechanical platform, two sets of motor control, or manual control;
6) Working gas line 2 channels
7) gas pumping unit, valve, pipeline 1 set
8) 1 set of machine mounting frame assembly
High quality square steel profile welded, quick unloading coaming surface spray treatment; Machine surface with stainless steel skin decoration; four casters can be fixed and movable
9) Vacuum measurement and electrical control system 1 set
10) Computer control system 1 set
Related photos of Customizable pulsed laser sputtering deposition system:Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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