Low Noise 1.0ug Capacitive Accelerometer

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Product origin: Nanjing, Jiangsu, China

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US$ 800 ~ 1500

Description

MAS3012 High Performance 1ug 1/2/3 Axis MEMS Accelerometer

Main Features
- Closed Loop Structure MEMS Capacitive Accelerometer
- Range:±2g,±5g, ±10g, ±30g, Excellent Bias Stability
- Dynamic Range: ≥110dB,
- Bandwidth: MAS3012-2 ≥1KHz (Typical Value, -3dB)
- Low Noise: MAS3012-2≤1.0μgrms/√Hz
- Non-linearity: 0.1%FS (Full Range)
- Extremely Reliable in Harsh Environment
- Wide Operating Temperature Range: -40~+85ºC

Brief Introduction
MS3012 single/dual/tri-axial MEMS accelerometer sensor is one type of high performance vibration
monitoring sensor base on MEMS technologies. It adopts 7~24V or 5V±3% power supply, integrate X-Y-Z
trial axes and self test function, it adopts high performance accelerometer, the dynamic range can reach
110dB.

MS3012 accelerometer sensor has passed the strictest tests, it enjoys excellent performance in noise,
dynamic range, non-linearity, repeatability, temperature drift, shock proof, etc. this product is an ideal option
for seismic monitor, vibration monitoring, high speed train/metro train, test platform of vibration and
shocking, structure health monitoring, etc.

Technical Specifications

Parameter	MS3012-02	MS3012-05	MS3012-10	MS3012-30	Unit
Range	±2	±5	±10	±30	g
Zero Bias	±20	±20	±20	±20	mV
Scale Factor Sensitivity (Differential Output )	1800±20	720±20	360±20	120±20	mV/g
Bandwidth (-3dB)	1000	200	200	200	Hz
Output Noise	1	1.5	3.5	4	μg/√Hz
Non-linearity	0.1	0.1	0.1	0.1	%
Cross-axes Influence	3	3	3	3	%
Bias Temperature Coefficient	±0.2	±0.2	±0.2	±0.2	mg/ ºC
Scale Factor Temperature Coefficient	120	120	120	120	ppm/ ºC
Parameter	Value				Remarks
Self Test Function
Frequency	19Hz				Square wave output
Duty Ratio	0.5
Amplitude	0.8g				Peak value
Single/Trixial Self Test Threshold Voltage	4Vmin 5Vmax				High level is valid
Accelerometer Output
Output Voltage (Differential Output )	0~ ±3.6V OutP :0.5~4.5V OutN: 0.5~4.5V				OutP, OutN full range output
Electrical Specs
Working Voltage	7~24V or 5V±3%
Working Current	≤25mA				Three axes
Startup Time	20ms
Environment Performance
Operating Temperature	-40~+85°C
Storage Temperature	-55~+125°C
Shock Resistance	6000g
Physical Specs
Dimensions	37×30×25mm
Casing	aluminum alloy
Weight	30grams (without lines),76 grams (with lines)

Typical Applications
- Seismic Monitor

- Micro-vibration Monitoring

- Inertial Navigation

- Structure/Building Monitoring

- Platform Stability

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