Complaint
1. Product Introduction
This series is mainly used for high-precision and high-speed cutting of Silicon Wafers.
2. Features
-With a 3-axis design and optimized design of cutting rollers' spacing, cutting of different specification products can be quickly switched, and ensure small wire bow and warpage.
-The equipment frame is cast in one piece and adopts the latest oil and gas-lubricated shaft box, the wire running speed reaches up to 2400m/min, much more stable.
-Optimize the design of the wire guide wheel distance, shorten the winding distance, reduce the twisting force and tension fluctuation, increase the wire arrangement detection device, and the broken wire rate <0.5%.
-The 3-axis design makes it easier and faster to change wires.
-Professional customized high-precision guide wheel set with more stable alignment.
-Smaller footprint.
-Wire break memory system.
-HMI is easy to operate.
-Equipped with safety devices for the electrical elevator door of the operation area.
-Easy operation, the opening workspace makes operation easier.
4. Parameter
| No. | Detail | Dimension | Value |
| 1 | Mechanics | ||
| 2 | Wire-speed | m/s | Max. 2400m/min |
| 3 | acceleration | m/s² | 8 |
| 4 | wire guide length | mm | 900 |
| 5 | wire guide diameter | mm | 192 |
| 6 | horizontal workspace | mm | 230 |
| 7 | Axis horizontal distance cut position | mm | 405-445 |
| 8 | Si rod diameter | mm / inch | Max.203 / 8 |
| 9 | Si rod length and orientation | mm / ° | 900/4 |
| 10 | wire guides | pcs | 3 |
| 11 | drive power | kW | 67*2/31*1 |
| 12 | drive | pcs | 3 |
| 13 | Cutting table | ||
| 14 | Stroke (depends on fixing method) | mm | 340 |
| 15 | cutting speed | µm/s | 0-9000 |
| 16 | table speed (feeding) | mm/s | 0-540 |
| 17 | passive fixation system | hydraulic clamping | |
| 18 | table | pcs | 1 |
| 19 | Wire | ||
| 20 | number of blocks (pulleys) | pcs | 6 |
| 21 | tension | N | 0-20 |
| 22 | wire length for Ø 160µm | km | 240 |
| 23 | wire web width | mm | 900 |
| 24 | Suspension | ||
| 25 | Based on deionized water (95%) | YES | |
| 26 | and additives (5%) | YES | |
| 27 | or Abrasive based on silicon carbide | YES | |
| 28 | (SiC) and polyethylene glycol | ||
| 29 | Tank capacity | L | 800 |
| 30 | pump capacity (depending on suspension quality) | kg/dm³ | 300 |
| 31 | pump power | kW | 7.5 |
| 32 | pump speed control | % | 0-100 |
| 33 | pump | pcs | 1 |
| 34 | manifolds in the cutting area | pcs | 2 |
| 35 | Cooling | ||
| 36 | cooling system with compressor for cold | YES | |
| 37 | water production | YES | |
| 38 | water temperature | °C | Max 14 |
| 39 | others | ||
| 40 | air pressure | bar | 4-6 |
| 41 | dry airflow | m³/h | 48 |
| 42 | exhaust pipe (total 500 m³/h) | mm | 1× ø150 |
| 43 | Inlet water pressure drop (delta P, minimum) | bar | 1.5 |
| 44 | Inlet water flow (depending on configuration) | m³/h | 2.3 |
| 45 | cooling unit power | kW | 35 |
| 46 | power supply 50Hz | V | 3-phase,380V,50Hz |
| 47 | average power consumption | kWA | 108 |
| 48 | maximum power consumption | kWA | 183 |
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