Complaint
Lab PECVD Tube Furnace System with 500W RF Generator
Specifications of CVD with 1200C tube furnace
| Vacuum tube furnace | Model | TN-1200X-III-50IC | |
| Tube material | High purity quartz | ||
| Tube diameter | 50mm | ||
| Tube length | 1000mm | ||
| Furnace chamber length | 660mm | ||
| Heating zone length | 200mm+200mm+200mm | ||
| Operating temperature | 0~1100ºC | ||
| Temperature control accuracy | ±1ºC | ||
| Temperature control mode | 30 or 50 segment program temperature control | ||
| Display mode | LED (highlight digital tube display) | ||
| Sealing method | 304 stainless steel vacuum flange | ||
| Flange interface | 1/4" cutting sleeve joint (Ø8 pagoda joint) | ||
| Vacuum | 4.4×10E-3Pa | ||
| Power supply | AC:220V 50/60Hz | ||
| Gas supply system | Model | TN-3F | |
| Gas channel | 3-channel | ||
| Measuring unit | Gas float flowmeter | ||
| Measuring range | A channel: 0~100ml H2 gas | The flow meter of the corresponding gas type and range can be selected according to customer's requirements | |
| B channel: 16~160ml N2 gas | |||
| C channel: 25~250ml Ar gas | |||
| measurement accuracy | ±2.0% | ||
| Pipe pressure resistance | 3MPa | ||
| Working pressure difference | 50~500KPa | ||
| Connecting pipe | 304 stainless steel | ||
| Gas channel | 304 stainless steel needle valve | ||
| Interface specification | 1/4" cutting sleeve joint for gas inlet and outlet | ||
| Exhaust system | Mechanical pump | GHD-031B | |
| Pumping rate | 4L/S | ||
| Exhaust interface | KF16 | ||
| Vacuum measurement | Pirani gauge | ||
| Ultimate vacuum | 1×10E-1Pa | ||
| Power supply | AC:220V 50/60Hz | ||
| Pumping interface | KF40 | ||
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
CVD-- tube furnace with 1200C single heating zone
CVD / PECVD-- tube furnace with 1200C triple heating zone
PECVD-- roll- to- roll
PECVD-- rotary type
Disulfide MOS2 CVD System
DCCVD system
HPCVD system
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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