Complaint
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Magnetron sputtering coating equipment is a special laboratory coating instrument developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.
PVD magnetron sputtering coating equipment with turbo molecular vacuum pump system
This equipment is a desktop single-target magnetron sputtering coater. The equipment has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise. The whole vacuum chamber adopts the design of bottom target, which has good sputtering effect and less impurity pollution, which can protect the sample to the utmost extent.
Specifications of single magnetron target sputtering coater
| TN-MSP180S-DC-GU single target magnetron sputtering coater | ||||
| Sample stage | size | φ100mm | Heating | Max. 500ºC |
| Rotating speed | 0-20 adjustable | Installation method | The sample stage is under the upper cover of the chamber, and the sample is installed as a clamp type | |
| Magnetron sputtering target | Quantity | 2" x1 Lower mounting with chamber lower flange | ||
| Vacuum chamber | Chamber size | Φ180mm x 215mm | Observation window | Front φ60mm |
| Chamber material | SS304 | Opening method | Top cover open | |
| Vacuum system | Mechanical pump | Rotary vane pump | Pumping interface | KF16 |
| Molecular pump | Turbomolecular pump | Pumping interface | KF40 | |
| Vacuum measurement | Resistance gauge + ionization gauge | Exhaust interface | KF16 | |
| Ultimate vacuum | 1.0E-4Pa | Power supply | AC 220V 50/60Hz | |
| Pumping rate | Mechanical pump: 1.1L/s Molecular pump: 60L/S | |||
| Power configuration | Quantity | DC power supply x1 | Maximum output power | DC power supply 300W |
| Other | Supply voltage | AC220V, 50Hz | Dimensions | 550mm x 350mm x400mm |
| Total power | 2kW | |||
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of
the chamber.
2. DC power or RF power target is available.
3. Different target material is optional
4. Strong magnetic target and Pernanent magenetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Single target magnetron sputtering coater with RF power
Single target magnetron sputtering coater with DC power
Desk single target magnetron sputtering coater with RF power
Single target magnetron sputtering coater with botom target
WE can ship the magnetron sputter coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
