OVERVIEW--THERMAL EVAPORATION
Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.
Three Source High Vacuum Evaporation Coater
There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals.Specifications of thermal evaporation coater
Three Source High Vacuum Evaporation Coater | ||
Sample stage | Size | Maximum support φ150mm sample |
Function | Rotatable, heating up to 500°C | |
Evaporation source | Quantity | Tungsten boat x3 |
Power | Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies | |
Vacuum chamber | Cavity size | φ300x400mm |
Observation window | Front φ100mm | |
Cavity material | 304 stainless steel | |
Open method | Front door | |
Film thickness control (optional) | Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller | |
Vacuum system | Foreline pump | Bipolar Rotary Vane Pump |
Exhaust port | KF16 | |
Secondary pump | Turbomolecular pump | |
Exhaust port | CF160 | |
Vacuum measurement | Resistance + Ionization Composite vacuum gauge | |
Exhaust rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Ultimate vacuum | 1.0E-5Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Rotary vane pump: 1.1L/S | |
Control System | PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network) | |
Other | Supply voltage | AC380V,50Hz |
Overall size | 1000mm X 800mm X 1500mm | |
Total power | 5kW | |
Total Weight | 350kg |
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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