Three Source High Vacuum Evaporation Coater

Min.Order: 1
Product origin: Zhengzhou, Henan, China
Infringement complaint: complaintComplaint
US$ 40000 ~ 48000

Description
 
Product Description

OVERVIEW--THERMAL EVAPORATION

Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.

Three Source High Vacuum Evaporation Coater

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800ºC. It can realize the evaporation of various refractory metals.
The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users.
The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse.
he equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.


 
Product Parameters

Specifications of thermal evaporation coater
 

Three Source High Vacuum Evaporation Coater
Sample stageSizeMaximum support φ150mm sample
FunctionRotatable, heating up to 500°C
Evaporation sourceQuantityTungsten boat x3
PowerEach evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies
Vacuum chamberCavity sizeφ300x400mm
Observation windowFront φ100mm
Cavity material304 stainless steel
Open methodFront door
Film thickness control (optional)Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller
Vacuum systemForeline pumpBipolar Rotary Vane Pump
Exhaust portKF16
Secondary pumpTurbomolecular pump
Exhaust portCF160
Vacuum measurementResistance + Ionization
Composite vacuum gauge
Exhaust rateMechanical pump 1.1L/s
Molecular pump 600L/s
Ultimate vacuum1.0E-5Pa
Power supplyAC 220V 50/60Hz
Pumping rateRotary vane pump: 1.1L/S
Control SystemPLC automatic control
Operation interface: touch screen + operation panel
(touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network)

Other
Supply voltageAC380V,50Hz
Overall size1000mm X 800mm X 1500mm
Total power5kW
Total Weight350kg
Detailed Photos




Company Profile


FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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