Technical Requirement | Commercial Grade | Precision Grade | High Precision |
Size range | 1-600mm | 2-600mm | 2-600mm |
Dimensional tolerance | ±0.1mm | ±0.025mm | ±0.01mm |
Angle tolerance | ±3´ | ±30´´ | ±5´´ |
Surface quality | 60-40 | 40-20 | 20-10 |
Surface accuracy | 1.0λ | λ/10 | λ/20 |
Coating | 3-5μm T >97% | ||
Bevelling | 0.1-0.5mm*45° | ||
Substrate | Optical grade silicon |
Length(mm) | Width(mm) | Thickness(mm) | Angle | Remark |
42 | 14 | 2 | 45 | |
50 | 20 | 2 | 45 | |
52 | 20 | 2 | 45 | |
52 | 20 | 2 | 45 | |
60 | 12 | 4 | 45 | |
68 | 10 | 6 | 45 |