Specification | Tank Car:26m³ Content: 28tons | |||
Application | 1. used as a protective gas for the production of high purity silicon and germanium crystals in the semiconductor industry; 2.used as inert gas for system cleaning, shielding and pressurization; 3. Be applied in chemical vapor deposition, sputtering, annealing and other processes. 4. used as chromatographic carrier gas, and can also be used as a dilution gas of gas mixture in large-scale integrated circuits. |