.Key Aluminum Nitride Properties | |
Good dielectric properties | |
High thermal conductivity | |
Low thermal expansion coefficient, close to that of Silicon | |
Non-reactive with normal semiconductor process chemicals and gases | |
.Typical Aluminum Nitride Uses | |
Substrates for electronic packages | |
Heat sinks | |
IC packages | |
Power transistor bases | |
Microwave device packages | |
Material processing kiln furniture | |
Semiconductor processing chamber fixtures and insulators | |
Molten metal handling components |