| Jinan ACME MW1070 MPCVD Machine |
| Vacuum | Vacuum measurement | Piezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000Pa |
| Operating pressure range | 4-28Kpa |
| Vacuum leakage rate | ≤ 5 * 10-9Pa.M3/S (He leak detection) |
| Pressure control | Auto-Control |
| Cavity material | Aluminum alloy excitation chamber, quartz vacuum chamber |
| Observation window | Temperature measuring hole with diameter of 10mm and observation window of porous hole |
| Cooling mode | Cooling mode | Water cooling+chamber air cooling |
| Sample table size | Molybdenum stage Φ 70mm, uniform area Φ 50mm |
| Temperature measurement | Infrared thermometer, range 300-1400 ºC |
| Cooling water flow | >50L/min |
| Cooling water temperature | 20-22ºC |
| Cooling water interface | 1-inch outer wire interface |
| Operating system | Operating system | PLC control, 15 inch touch screen control |
| Process Menu | 10 process menus, 25 lines for each |
| Microwave and power supply | Microwave frequency | 2.45±0.1GHz |
| Output power | 1.5-7.5Kw (equipped with 10kw domestic microwave power supply) |
| Input power electricity | 380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15Kw |
| Microwave leakage rate | Microwave leakage rate 5cm away from the equipment ≤ 5Mw/cm2 |
| Process gas | Flowmeter and interface | H2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 "VCR female compressed air 8mm Pu tube quick plug |
| The flowmeter can change the type of gas used through software |
| Air supply pressure | 0.3-0.35MPa |
| Compressed air pressure | 0.5-0.6MPa |
| Vacuum pump | Rotary vane vacuum pump | Oil pump |
| Pumping speed | 4L/S |
| Power supply | Ac 380V(±10%) |
| Interface | Air extraction KF25, air exhaust KF25 |
| Operating environment | Ambient temperature and humidity | The room temperature is lower than 26 ºC and the humidity is lower than 40% |
| Overall dimensions of equipment | Size | 1250(L)×800(W)×2100(H)mm |
| Equipment appearance | | |
| Equipment acceptance conditions: | 1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B's technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A. |
| 2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping. |
| 3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment) |
Complaint
