NO. | Parts name | Model | QTY | Remark |
1 | Programmable microwave source | 6kW/2450MHz | 1 | |
1-1 | Magnetron | PM60AL | 1 | Panasonic, Japan |
2 | Microwave transmission | BJ-26 circulator, pin mixer, water load,transition waveguide, etc | 1 | Chengdu |
3 | Mode converter and Microwave coupling cavity | TE10-TM013 | 1 | Chengdu |
4 | Plasma working cavity | Includes inflatable flanges, quartz windows, and ports. | 1 | ACME |
5 | Sample stage and adjustment | Electric continuous lifting adjustment | | |
6 | Vacuum acquisition | Vacuum acquisition vacuum pump, valve, pipeline, and vacuum measurement system | 1 | ACME |
6-1 | Vacuum pump | 8L/s | 1 | Zhongke Keyi or Feiyue |
6-2 | Vacuum measurement | Vacuum gauge | 1 | Inficon |
6-3 | Work pressure control | Pressure regulating valve and controller | 1 | ACME |
7 | Gas MFC unit | 4-way mass flow control and valves. | 1 | HORIBA |
8 | Infrared thermometer | 300~1400ºC | 1 | Kentech |
9 | Main control unit | PLC main control, 10 inch touch operation screen, and cabinet | 1 | Siemens |