He, Teneur % | ≥99.9999 | 99.9999 | ||||||||
H2, ppm | ≤0.1 | <0.1 | ||||||||
O2, ppm | ≤0.2 | <0.2 | ||||||||
N2, ppm | ≤0.5 | <0.5 | ||||||||
CO, ppm | ≤0.1 | <0.1 | ||||||||
CO2, ppm | ≤0.1 | <0.1 | ||||||||
CH4, ppm | ≤0.1 | <0.1 | ||||||||
H2O, ppm | ≤0.5 | <0.5 |