Plasma Enhanced CVD Tube Furnace for Deposition of High-Quality Hard Films

Min.Order: 1
Product origin: Zhengzhou, Henan, China
Infringement complaint: complaintComplaint
US$ 9999 ~ 39999

Description
Product Description

Plasma Enhanced CVD Tube Furnace for Deposition of high-quality hard films

The PECVD system uses microwave or radio frequency to ionize the gas containing the film constituent atoms to form a plasma locally. The plasma has a strong chemical activity and is easy to react to deposit the desired film on the substrate. The system is widely used to deposit high-quality SiO2 film, Si3N4 film, diamond film, hard film, optical film, carbon nanotube (CNT), C/C composite material, SiC coating, graphite product coating, etc.
Product Parameters
ModelDM-12NT-PECVDDM-14ST-PECVDDM-17MT-PECVD
Max Temperature1200ºC1400ºC1700ºC
Working Temperature1100ºC1300ºC1600ºC
Heating ElementResistance WireSiCMoSi2
ThermocoupleK TypeS TypeB Type
Temperature ZoneNumber/Diameter/Length(Can Be Customized)
Temperature Accuracy±1ºC
Rated VoltageAC220V50Hz/60Hz (can be customized)
Gas ControlFloat Flow Meter/Mass Flow Meter
Vacuum SystemRotary Pump/Diffusion Pump/Turbo Molecular Pump(Optional)
RF Power100-1000W(Optional)
Optional FunctionTouch Screen/Remote Control/Computer Monitoring
Can Be Customized
Company Profile

Dming Technology is the leading manufacturer of lab furnace, industrial furnace and the related accessories.As a manufacturer with more than 10 years' experience in thermal engineering, Dming Technology offers the wide and deep range of furnaces worldwide. Satisfied customers in more than 30 countries offer proof of our commitment to excellent design, quality and cost efficiency.Dming Technology offers a complete line of high temperature processing technologies in many styles and configurations.From muffle furnaces, Melting furnace, distillation furnace, electric arc furnace to vacuum sintering furnaces(Powder Metallurgy), Mesh belt furnace,oil gas quenching furnace and large-scale production ceramic kilns.Our customized solutions include products and heat treatment processes designed to meet specific customer requirements, and provide sample testing until the customer is satisfied.

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FAQ

Q1: How is your company's product after-sales service system?
A: We have professional pre-sales and after-sales departments and

can respond to you within 8 hours to resolve any technical issues.
Q2: How about the quality guarantee period?
A: 2 years, exclude irrationally operating and consumable parts. 
Q3: How about your products quality?
A: CE certification available and twice test before shipping.
Q4: What's your delivery time?
A: Conventional model needs 3 days.35 days for customized products
Q5: Are you a manufacturer or a trading company?
A: We are a factory with 10 years experience in the field.

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