Description
1200C Plasma Enhanced Chemical Vapor Deposition PECVD Vacuum FurnaceProduct description of PECVD Vacuum Furnace Plasma enhanced CVD machine consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.
In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.applications:This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.Technical parameters of PECVD Vacuum Furnace | Three-heating zone tube furnace | Model | CY-O1200-50IIIT |
| Tube material | High purity quartz |
| Tube diameter | 50mm |
| Tube length | 2830mm |
| Furnace chamber length | 660mm |
| Heating zone length | 200mm+200mm+200mm |
| Operating temperature | 0~1100ºC |
| Temperature control accuracy | ±1ºC |
| Temperature control mode | 30 or 50 segment program temperature control |
| Display mode | LCD |
| Sealing method | 304 stainless steel vacuum flange |
| Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
| Vacuum | 4.4E-3Pa |
| Power supply | AC:220V 50/60Hz |
| Single-heating zone tube furnace | Model | CY-O1200-50IT |
| Tube material | High purity quartz |
| Tube diameter | 50mm |
| Tube length | 2830mm |
| Furnace chamber length | 440mm |
| Heating zone length | 400mm |
| Constant temperature zone | 200mm |
| Operating temperature | 0~1100ºC |
| Temperature control accuracy | ±1ºC |
| Temperature control mode | 30 or 50 segment program temperature control |
| Display mode | LCD |
| Sealing method | 304 stainless steel vacuum flange |
| Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
| Vacuum | 4.4E-3Pa |
| Power supply | AC:220V 50/60Hz |
| RF output system | Power range | 0~500W adjustable |
| Working frequency | 13.56MHz+0.005% |
| Working mode | Continuous output |
| Display mode | LCD |
| Matched impedance mode | Can match, the glow is evenly covered with three heating zone furnace tubes |
| Power stability | ≤2W |
| Normal working reflected power | ≤3W |
| Amplified reflected power | ≤70W |
| Harmonic component | ≤-50dBc |
| Machine efficiency | ≥70% |
| Power Factor | ≥90% |
| Supply voltage / frequency | Single-phase AC (187V~153V) Frequency 50/60Hz |
| Control mode | Internal control / PLC analog / RS232 / 485 communication |
| Power protection settings | DC overcurrent protection, power amplifier over temperature protection, reflected power protection |
| cooling method | Forced air cooling |
| Glow length | In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones. |
| Gas supply system | Four-channel mass flowmeter | Mass flowmeter |
| Flow range | MFC1 range: 0~200sccm
MFC2 range: 0~200sccm
MFC3 range: 0~500sccm
MFC4 range: 0~500sccm
Corresponding to gases H2, CH4, N2, Ar, |
| measurement accuracy | ±1.5%F.S |
| Repeatability | ±0.2%FS |
| Linear precision | ±1%F.S. |
| Response time | ≤4s |
| Work pressure | -0.15Mpa~0.15Mpa |
| flow control | LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control |
| Intake interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube |
| Outlet interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube |
| Connection method | Double ferrule connector |
| Operating temperature | 5~45ºC |
| Gas premix | Equipped with gas premixing device |
| Exhaust system | Mechanical pump | Rotary vane pump |
| Pumping rate | 1.1L/S |
| Exhaust interface | KF16 |
| Vacuum measurement | Resistance gauge |
| Ultimate vacuum | 1.0E-1Pa |
| Power supply | AC:220V 50/60Hz |
| Pumping interface | KF16 |
| Rail | Rail length | 2.5m~3m
It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall. |
NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flow meter.Related photos of PECVD Vacuum Furnacetube furnaceExhaust system (vacuum pump)
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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