FMM501 Mass flow controller is used for precise measurement and control of the mass flow of gas. They play an important role in scientific research and production in the fields of semiconductor and integrated circuit industry, special materials, chemical industry, industry, medicine, environmental protection and vacuum lamps. Typical applications include: electronic process equipment, such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation; and coating equipment, optical fiber melting, micro-reaction device, mixed gas distribution system, capillary measurement Gas chromatograph and other analytical instruments.
Technical indicators | MFC | MFM |
Range | 2SCCM-300SLM | |
Accuracy | ±1% F.S | |
temperature ±1ºC | ||
Linear | ±0.5% F.SºC | |
Repeatability | 0.2% F.SºC | |
Response time | <2s | <1s |
Analog | 0-5v/4-20mA | |
Communication | RS485 Modbus RTU | |
Power supply | ±15V/24V | |
Working temp | 0-50ºC | |
Differential pressure | Dp: 0.05-1.0MPa | press drop: <30Kpa |
Max pressure | 3Mpa/10Mpa | |
Electrical connection | DB15 | |
Leakage rate | 1×10-8 SCCSHe | |
Temp C.F | ±0.015% F.S/ºC | |
Base material | 316 SST | |
Sealing | PTFE/CR/NBR | |
Fitting | 1/4" 3/8" 6mm 10mm |
SENTEC concentrates on the solutions for sensing technology.
For decades, SENTEC quality guaranteed products insist strictly manufactured in accordance with ISO, CE directive and fully RoHS compliant. On the basis of large-scaled production factories and international excellent devices, SENTEC inspections, tests and calibrations are well recognized throughout the world with experienced OEM service.1. Could I have prices of your products?
Welcome. Pls feel free to send us an email here. You will get our reply in 24 hours
2. Can we print our logo/website/company name on products?
Yes, please advise the size and Pantone Code of the logo.
3. What's the lead time for regular order?
3~7 days for order quantity lower than 500pcs, For more quantity, usually 15 days.
4. Can I get a discount?
Yes, for the order quantity more than 50pcs, please contact us to get the best price.
5. What is your MOQ?
The MOQ of most of our products is 1PCS. You can also contact us to get a lower low MOQ.
6. How to contact you?