Type 5L is a dual gas input. | |
Cavity material | Stainless steel surface treatment |
Power supply | AC220V |
Working current | The working current of the whole machine is not more than 1.2A (excluding vacuum pump) |
RF power supply | 0-300W Adjustable |
RF frequency | 40KHZ |
Frequency offset | < 0.2KHz |
Characteristic impedance | 50 ohm, automatic matching |
Vacuum degree | 1pa-30Pa |
Number of gas paths | Dual gas input |
Gas flow | 10-100ml/min(Adjustable) |
Process control | PLC operation interface automatic and manual mode |
Cleaning time | 1-6000s(Adjustable) |
Power size | 10%-100%(Adjustable) |
Inner cavity size | L×W:150*270mm |
Dimension | 510x450x420 mm |
Weight | 45Kg |
Vacuum pump | 2XZ-4 |
Vacuum chamber temperature | < 65°C |
Cooling method | Forced air cooling |