Precursor for The Chemical Vapor Deposition (CVD) Process Wf6 Gas Tungsten Hexafluoride

Min.Order: 1

Product origin: Shanghai, China

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US$ 10 ~ 30

Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

Chemical Formula: WF6
Molecular Weight: 297.84 g/mol
Structure: tungsten hexafluoride(WF6) has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
Physical Properties: Tungsten hexafluoride is a yellowish-green gas with a pungent odor. It is highly reactive and can react violently with water or moisture in the air. It has a high vapor pressure and is usually handled as a compressed gas or stored as a liquid under pressure.
Uses: tungsten hexafluoride(WF6) is primarily used in the semiconductor industry as a precursor for the chemical vapor deposition (CVD) process. It is a key component in the production of tungsten films or layers on silicon wafers used in the fabrication of integrated circuits and other electronic devices. The CVD process allows for the controlled deposition of tungsten layers with high purity and uniformity.
Reactivity: Tungsten hexafluoride is a strong oxidizing agent and reacts readily with many substances, including water, organic compounds, and metals. It can generate toxic and corrosive hydrogen fluoride (HF) gas when it comes into contact with moisture. Special precautions and safety measures are necessary when handling WF6 due to its reactivity and potential hazards.
Safety Considerations: tungsten hexafluoride(WF6) is highly toxic and corrosive. It can cause severe burns to the skin, eyes, and respiratory system upon contact. Inhalation or exposure to high concentrations of WF6 can be fatal. Proper protective equipment, such as gloves, goggles, and respiratory protection, should be used when working with WF6.
Storage and Handling: Tungsten hexafluoride is typically stored and transported in specially designed containers that can withstand the high pressures and corrosive nature of the gas. Strict safety protocols should be followed to prevent accidental release or exposure.
Environmental Impact: Due to its reactivity and potential hazards, appropriate measures should be taken to prevent the release of tungsten hexafluoride(WF6) into the environment. Disposal of tungsten hexafluoride(WF6) waste should be conducted in accordance with local regulations and guidelines.

Product Spec:

Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

Detailed Photos

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

Our Advantages

1. Fast delivery;
2. Stable raw material source;
3. On-line analysis system for quality control in every step;
4. High requirement and meticulous process for handling cylinder before filling;
Our carbon monoxide have been exported to many countries like India, Pakistan, Malaysia, Indonesia, Australia, Singapore, Maldives and Ecuador.
Since the establishment of our company, it has received universal praise by virtue of good reputation, high quality and perfect after service.

FAQ

1. Q: Are you a factory or a trading company?
A: We are a manufacture and trade integration company. Expert R&D department and sophisticated supply chain is our key of success.

2. Q: Are bulk orders and multiple product orders available?
A: Yes, we have a strong production supply system to make sure all of your requirements satisfied. One station product solution is our aim of service.

3. Q: What if I never imported this product before, how do I do it?
A: Don't worry. We have import and export experience with over 50 countries over the world, our fulfillment department will guide you every step of the process.
4. What is the MOQ?
Different products have different min order. It's depends on the kind the gas and the cylinder specifications. Please feel free to contact with me directly for your requirement.

5. Q: Why choice us Kemike Gas ?
A: Stable Supply, Professional Solution, Reasonable Price, and Safety Business with our Taiyu.

6. Q: 3. How does your factory do the quality control?
A: We have standard quality control procedure.
a> In production, we have quality analysis system to make sure each step is qualified.
b> Before filling, we do the pre-treatment for the cylinders to clean well.
c> After filling, we will do 100% inspection analyze before delivery.

7. Q:Is it possible to ship by air?
A:Gases are classified into class 2.1, class 2.2 and class 2.3 which are inflammable gas, non-flammable gas and poisonous gas. According to regulation, inflammable gas and poisonous gas cannot be shipped by air, and only non-flammable gas can be transported by air. If the amount purchased is large, sea transportation is better.

8. Q:Can I customize the package?
A:Yes of course! The most regular package is cylinder. Its size, color, valve, design and other requirements can all be met.

9. Q: What is the package & storage details?
A:Seamless steel cylinder with different valves, or as to your requirement.
Stored in shady, cool, dry, ventilated warehouse, and keep away from sunlight and ramming.

10. More question......
Feel free to contact us, you will get immediately reply.

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